X Axis: 17.5mm/0.69"; Z Axis: 160µm /6300µin

• Resolution (Ra): 0.001µm
• Accuracy: ±10%
• Probe type: Inductive
• Probe stylus radius/angle: 5µm/90 degrees
• Probe stylus material: Diamond
• Measuring force: 4mN
• Specifications

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  Documents

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  Notes

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